GSC
GSC Series
Pressure Transducer for Slurry and Chemical
Application
- Slurry and Chemical Line for semiconductor process
- Waterproof (IP67)
Features & Benefits
- Minimize Ieal‹ point due to one body design
- Zero volume I-lard cal’ function supporting
- Stable pressure value output in response to temperature change
- Compact size
Specifications
|
Application |
Process conditions Slurry, Chemical |
|
Measurement Range |
0 – 70, 100, 1SOPSIG |
|
Design Pressure |
1.1 x F.S |
|
Over Pressure |
I .5 • f.S |
|
L.H.R.* 1 |
10.5 9»F.S |
|
Output Sig nal |
4-2OmA / 0- I 0V |
|
Supply Voltage |
DC24V 110% |
|
Operating Temp Range |
10 – 80‘c |
|
Compensated Temp Range |
1D – 60V |
|
Thermal E fleets |
Less than 20.05Y<SPAN (STD25V*25‘¢) |
|
Material |
Wetted part PTFE |
|
Process Connector |
Flared T/4”. 1/2″, 3/4″, I “ |
Note’ •1 Linearity. Hysteresis & Repeatability
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